Atomic ordering in AlxGa1−xN thin-films

Samples of AlxGa1−xN with xAl = 25%, 48%, and 78% were grown by metal organic chemical vapor deposition and examined using cross-sectional transmission electron microscopy. All samples were shown to exhibit both (0 0 0 1) type ordering spots and streaking. The morphology of the ordered regions was determined to be plate-like on (0 0 0 1) planes, with unequal axes in-plane.