کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1504957 | 993748 | 2012 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: High performance distributed CPW phase shifters with etched BST thin films on Ф 3″ LaAlO3 substrates High performance distributed CPW phase shifters with etched BST thin films on Ф 3″ LaAlO3 substrates](/preview/png/1504957.png)
The design, fabrication and microwave properties of distributed coplanar waveguide (CPW) phase shifters using etched Ba0.6Sr0.4TiO3 (BST) thin films on Ф 3″ LaAlO3 (100) substrates were investigated. The BST thin films employed in the circuits are deposited by RF magnetron sputtering, and then annealed at 800 °C for 30 min in air. BST thin films parallel-plate capacitors were fabricated by photolithography and etching process. At 10 kHz and 600 kV/cm electric field, the dielectric tunability, remanent polarization (2Pr) and the coercive electric field (2EC) of BST film were 28.7%, 2.265 μC/cm2 and 38.8 kV/cm, respectively. The loss tangent was 0.005 at zero electric field. The CPW phase-shifter designed was subsequently fabricated by optimum BST thin films and thickened top electrodes. At 21.3 GHz and 35 V, 360° phase shift was achieved, the insertion loss was −8.5 dB, the figure-of-merit (FOM) was 42.4°/dB, and the return loss was −12.1 dB.
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Journal: Solid State Sciences - Volume 14, Issue 1, January 2012, Pages 117–120