کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1505940 993777 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Pd gate MOS sensor for hydrogen detection
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Pd gate MOS sensor for hydrogen detection
چکیده انگلیسی

The performance of Pd gate MOS hydrogen sensor was studied using C–V and G–V characteristics. The device was fabricated on p-type <100> (1–6Ω cm.) silicon with thermal oxide layer of about 100 Å. The C–V and G–V responses of sensor were measured at different frequencies (1 kHz, 10 kHz, and 100 kHz) upon exposure to hydrogen (conc. 1–8%) at room temperature. It was observed that value of zero bias capacitance decreases with increase in frequency as well as hydrogen concentration. The inversion potential (Vinv.) and flat band voltage (VFB) of the device approach higher values as frequency is reduced. Interface trap density (Nit) was also determined corresponding to the peak in the conductance curve, using a bias scan conductance method at fixed frequency. Nit was found to be decreasing with increasing concentrations of hydrogen. The sensor showed better sensitivity at lower frequency.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid State Sciences - Volume 11, Issue 8, August 2009, Pages 1370–1374
نویسندگان
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