Incorporation of Fe into NiSi2 precipitates

The present paper provides evidence that Fe can be incorporated into NiSi2 precipitates by solid-state diffusion. Furthermore, analysis of Si crystals contaminated with Ni and Fe at 1100 °C and post annealed at 600 °C and 800 °C for 20-240 min revealed a strong indication that this incorporation is limited by bulk diffusion rather than incorporation kinetics.