Effect of the immersion in CdCl2 and annealing on physical properties of CdS:F films grown by CBD

Fluorine-doped CdS films were deposited on glass substrates at 70 °C by chemical bath deposition using HF as fluorine source. The as-grown films were immersed in a 0.25 M CdCl2 solution and annealed at 400 °C in a nitrogen atmosphere. Effects of doping and post-deposition treatment on structural, topography, optical and electrical properties were investigated. The post-deposition treatment causes an increase in the grain size, a decrease in the rms roughness and a reduction in the resistivity of the CdS:F films. After treatment a CdS:F film with a roughness of 2.39 nm and a resistivity of 2.96 Ω cm was obtained.

► CdS:F thin films were prepared by CBD.
► The as-grown films were immersed in a CdCl2 solution and heated in a N2 atmosphere.
► The treatment causes a reduction in the resistivity of the CdS:F films.