Solid-phase crystallization of amorphous Si films on glass and Si wafer

► Solid-phase crystallization of an amorphous material needs the activation energy. ► The energy is supplied in the form of thermal energy by increasing the temperature. ► When nucleation occurs, the strain energy develops in to metastable and stable phases. ► The strain energy in amorphous phase varies with stresses and crystal direction. ► We discuss solid-phase crystallization of amorphous Si films on glass and Si wafer.