کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1518413 1511617 2007 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Efficient diffractive optical elements in chalcogenide glass layers fabricated by direct DUV laser writing
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Efficient diffractive optical elements in chalcogenide glass layers fabricated by direct DUV laser writing
چکیده انگلیسی

Direct laser writing with high power densities at a wavelength of 244 nm is applied to the patterning of surface relief diffractive optical elements (DOEs) with submicron features in thin chalcogenide layers of different compositions. The topology of created features in dependence on exposure conditions is investigated. Potential and limitations of this technique for the fabrication of efficient DOEs for applications from the visible to the near infrared spectral region are discussed on the basis of examples.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Physics and Chemistry of Solids - Volume 68, Issues 5–6, May–June 2007, Pages 916–919
نویسندگان
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