Fabrication and corrosion behavior of fresh porous silicon in sodium hydroxide solution

The corrosion behavior of fresh porous silicon (f-PS) in sodium hydroxide (NaOH) solution in the presence and absence of ethanol was studied by weight loss measurements and scanning electron microscope (SEM) technique. The phenomena and progress of f-PS corrosion in 1.0 M NaOH at 318 K was obtained and described. Weight loss measurements show that the corrosion rate increases with increasing temperature and concentration of NaOH solution. Meanwhile, the corrosion rate first increases with increasing volume ratio of ethanol in 1.0 M NaOH, and then decreases. Additionally, the thermodynamic and kinetic parameters (Ea, A, ΔHa and ΔSa) for f-PS corrosion were obtained and discussed. And the effect factors (T, c and v) of f-PS corrosion in NaOH solution were studied in this paper.