CaCu3Ti4O12 thin films on conductive oxide electrode: A comparative study between chemical and physical vapor deposition routes

► Dielectrics growth and characterization is one of the most hot topics of materials science and microelectronics. ► CaCu3Ti4O12 perovskite, recently, demonstrated to possess peculiar dielectric properties (Science, 2001, 293, 673-676). ► To date no deep discussion on the growth processes, properties and perspective of CCTO thin films has been proposed. ► Our paper is an effective example of interdisciplinarity, since the comparison between PLD and MOCVD has been addressed. ► Great attention has been paid to CaCu3Ti4O12 film/substrate interfaces since dielectric properties are strongly affected.