Optimum electrodeposition conditions of FeCoZr films with in-plane uniaxial anisotropy for high frequency application

FeCoZr soft magnetic films with amorphous structure were electrodeposited onto ITO conductive glass substrates from the electrolytes with different composition and deposition potential. The factors which affect the deposit composition were discussed. The in-plane uniaxial magnetic anisotropy of film intensively depended on the concentration of boric acid. The coercivity of thin films decreased significantly with the composition gradient of doping Zr element. The ferromagnetic resonance frequency was as high as 3.4 GHz. Therefore, these films have a wide range of applications in the high-frequency field.

► FeCoZr alloy films are prepared on ITO by electrochemical deposition.
► The structure of films is influenced by electrodeposition parameter.
► The in-plane magnetic anisotropy intensively depends on additives in electrolyte.
► The doping of Zr element effectively decreases the coercivity of films.
► The resonance frequency can reach 3.4 GHz.