Germanium strips for channeling: Study of the crystal quality after slicing and chemical etching

► Strips of Ge single crystal cut either by diamond saw or by wire electrical discharge machine. ► Introduced crystal structure damage is investigated by c-RBS, micro-Raman spectroscopy, HRXRD. ► Damage removal through wet chemical etching. ► Study of morphology and structure evolution with etching time. ► Choice of the best procedure to achieve optimal crystal quality for high energy protons channeling.