Laser-induced grayscale patterning in TeOx thin films

► Grayscale patterns with precise grayscale changes are fabricated on TeOx thin film. ► Two obvious changes of grayscale level emerge as laser energy increases. ► The first change is from invisible to white-grayscale with low laser energy. ► The second change becomes darker and darker following the laser energy increases. ► The mechanism involves many reasons, different mechanism is dominant in each stage.