Structural, electrical and photoluminescence properties of ZnO:Al network films grown on nanochannel Al2O3 substrates by direct current magnetron sputtering with an oblique target

► ZnO:Al network films were grown on nanochannel Al2O3 substrates by sputtering. ► The network films exhibit a semiconducting behavior. ► The carrier transport mechanism is thermally activated band conduction. ► The thin film shows a violet emission and the thick films show a blue emission.