Facile micropatterning of mesoporous titania film by low-energy electron beam irradiation

► A facile method to prepare ordered mesoporous titania films by low-energy electron beam (LEEB) irradiation was demonstrated. ► The LEEB irradiation (25 kV, 300 μA) was useful for rapid removal of surfactant molecules (within ∼5 min at ∼3 Pa) with the retention of mesostructure. ► These titania frameworks could be crystallized into anatase through rapid thermal treatment. ► One-pot micropatterning of mesoporous titania film (for example, 25 μm × 25 μm features) was successfully demonstrated by site-selective LEEB irradiation, followed by washing away unirradiated regions with water.