کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1524887 | 995344 | 2011 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Picosecond laser pulse-driven crystallization behavior of SiSb phase change memory thin films Picosecond laser pulse-driven crystallization behavior of SiSb phase change memory thin films](/preview/png/1524887.png)
Transient phase change crystallization process of SiSb phase change thin films under the irradiation of picosecond (ps) laser pulse was studied using time-resolved reflectivity measurements. The ps laser pulse-crystallized domains were characterized by atomic force microscope, Raman spectra and ellipsometrical spectra measurements. A reflectivity contrast of about 15% can be achieved by ps laser pulse-induced crystallization. A minimum crystallization time of 11 ns was achieved by a low-fluence single ps laser pulse after pre-irradiation. SiSb was shown to be very promising for fast phase change memory applications.
► We reported crystallization dynamics of a novel SiSb phase change material.
► We measured optical constants of as-deposited and irradiated SiSb areas.
► Optical properties of as-deposited and irradiated SiSb thin film were compared.
► Crystallization of irradiated SiSb was confirmed by using AFM and micro-Raman spectra.
► The heat conduction effect of lower metal layer of multi-layer films was studied.
Journal: Materials Chemistry and Physics - Volume 128, Issue 3, 15 August 2011, Pages 405–409