کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1525590 995357 2009 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of chemical composition, phase and thickness of TiOx (x ≤ 2) seed layer on the growth and orientation of the perovskite phase in sputtered PZT thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Influence of chemical composition, phase and thickness of TiOx (x ≤ 2) seed layer on the growth and orientation of the perovskite phase in sputtered PZT thin films
چکیده انگلیسی
To study the influence of TiOx (x ≤ 2) seed layer on the formation of perovskite phase in lead zirconate titanate [Pb(Zr0.52Ti0.48)O3] thin films, TiOx films of thickness ∼20-480 nm were prepared on corning-1737 glass substrates by r.f. magnetron sputtering and then post-annealed in air at different temperatures (350-650 °C). Depending mainly on seed layer thickness, TiOx films transform either into anatase or rutile TiO2 after air-annealing. Thin PZT films (∼150 nm) were then deposited on substrates pre-coated with TiOx seed layers and air-annealed at 650 °C. It is found that thin TiO2 seed layers (≤150 nm) promote perovskite phase formation in PZT films. Anatase TiO2 promotes the growth of randomly oriented perovskite PZT. A (1 0 1) textured rutile TiO2 of thickness ∼100 nm favours the growth of highly oriented perovskite phase along (1 0 0) and surface morphology of these PZT films shows dense rosette structures. A TiO or an amorphous TiOx seed film does not initiate perovskite growth. As the thickness of the TiOx seed layer exceeds ∼150 nm, perovskite phase does not form readily irrespective of the crystalline form/phase of TiOx. Thus, chemical composition, crystalline phase and thickness of the TiOx seed layer influence remarkably the crystalline phase, texture and surface morphology of the grown PZT films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Chemistry and Physics - Volume 115, Issue 1, 15 May 2009, Pages 453-462
نویسندگان
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