Electrical and optical study of ITO films on glass and polymer substrates prepared by DC magnetron sputtering type negative metal ion beam deposition

The values of figure of merit (T10/Rsh) for ITO/glass (ϕTC = 7.7 × 10−3 Ω−1) are higher than ITO/PES (ϕTC = 1.3 × 10−3 Ω−1), indicating that ITO/glass achieved the best performance in this study.