Photochemical deposition of NiCoOx thin films from Ni/Co heteronuclear triketonate complexes

UV light irradiation of thin films of a polyketonate Ni/Co heteronuclear complex, NiCo(DBA)2 [DBA, dibenzoylacetone)], spin coated on Si(1 0 0) substrates produced NiCoOx mixed oxides as amorphous films. On annealing at 600 °C under air, the mixed oxide film decomposed to NiO and CoO as indicated by XRD measurements. The morphology of the as-deposited films was examined by AFM analysis showing a smooth surface with low rms roughness values. The ratio of Ni/Co (1.08) present in the film reflects the stoichiometry in the starting compound within the experimental error, as shown by XPS analysis. The large amount of carbon (20.8%) detected on the surface of the film may be due to the presence of phenyl rings in the precursor complex.