Influence of the substrate nature on the properties of ZnO thin films

Zinc metallic films, deposited onto different substrates, were submitted to a thermal oxidation process, in air, in order to obtain ZnO thin films. X-ray diffraction patterns revealed that as-obtained ZnO thin films were polycrystalline and have a wurtzite (hexagonal) structure. The temperature dependences of the electrical conductivity during some heating/cooling cycles were studied and the conduction mechanism was interpreted in terms of Seto model. The sensitivity of ZnO thin films, at five gases, was investigated and it was established that ethanol is the test gas that produces the most significant changes in the electrical resistance of all the studied films. Some correlations between the oxidation temperature and the substrate nature and the parameters which characterize the structural and electrical properties of ZnO thin films have been established.

► The structural characteristic parameters are influenced by the substrate nature.
► The values of structural parameters depend also on the oxidation temperature.
► The Seto model explains the mechanism of electrical conduction.
► The investigated samples present promising results as gas sensor.