کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1529604 1511990 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Properties of doped ZnO thin films grown by simultaneous dc and RF magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Properties of doped ZnO thin films grown by simultaneous dc and RF magnetron sputtering
چکیده انگلیسی

Doped ZnO films such as Cu- and Ag-doped with different at.% have been grown using simultaneous RF magnetron sputtering of ZnO and dc sputtering of Cu and Ag. The structural, electrical and optical properties of the films are investigated using different characterization tools. It is observed that both films show different surface morphologies with preferential crystalline growth orientation along (0 0 2). More significantly Ag-doped ZnO film show low resistance and high transmittance than that of Cu-doped film of same thickness and doped content. ZnO film doped with 2 at.% Cu shows high resistivity of the order 108 Ω cm.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: B - Volume 171, Issues 1–3, 25 July 2010, Pages 99–103
نویسندگان
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