کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1531930 | 1512020 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Nanomechanical characteristics of BaxSr1−xTiO3 thin films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The nanomechanical properties of barium strontium titanate (BaxSr1−xTiO3, x = 0–1) deposited on a silicon substrate were investigated using the metalorganic deposition method. The characteristics of the BaxSr1−xTiO3 thin film's crystalline structure and surface roughness were achieved by means of X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicated that as the Ba content was decreased and therefore the Sr content was increased a lower leakage current density and a smaller grain size were obtained. Also the mechanical properties such as hardness, Young's modulus and contact stress–strain were also studied by nanoindentation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: B - Volume 131, Issues 1–3, 15 July 2006, Pages 281–284
Journal: Materials Science and Engineering: B - Volume 131, Issues 1–3, 15 July 2006, Pages 281–284
نویسندگان
Sheng-Rui Jian, Win-Jin Chang, Te-Hua Fang, Liang-Wen Ji, Yu-Jen Hsiao, Yee-Shin Chang,