Heteroepitaxy and selective area heteroepitaxy for silicon photonics

This article reviews the major achievements in recent years on heteroepitaxy and selective area heteroepitaxy that are relevant to silicon photonics. Material aspects are given due importance without trying to cover all kinds of devices. Under heteroepitaxy several systems based on GaAs, InP and GaSb and their related materials and dilute III-nitrides all on Si substrates are covered and assessed. Quantum dot and quantum well lasers are taken as device examples. The potential of the emerging SnGeSi/Si system is highlighted. Under selective area heteroepitaxy, growth of InP from SiO2 trenches in Si and epitaxial lateral overgrowth of InP on silicon are exemplified as the potential routes for monolithic integration on silicon. The expected trends and anticipated advances are indicated.

► Reviews major achievements in heteroepitaxy and selective area heteroepitaxy.
► Materials relevant for monolithic integration in silicon photonics treated.
► The expected trends and anticipated advances are indicated.