Toward a multifunctional monolithic device based on pyroelectricity and the electrocaloric effect of thin antiferroelectric HfxZr1−xO2 films

The schematics of the proposed monolithic device with various devices for pyroelectric energy harvesting/electrocaloric cooling (upper center panel), high-charge capacitor/electrostatic energy storage (upper right panel), and IR sensing (upper left panel), respectively. (ICA: interconnect conducting adhesive).158