FE modeling of stress and deflection of PZT actuated micro-mirror: Effect of crystal anisotropy

The thickness of silicon substrate in the diaphragm region has also shown to have a significant influence on the deflection of micro-mirror. The deflection was found to increase dramatically to 133 mrad with the complete removal of silicon substrate. FE modeling taking materials anisotropy into account has proved to serve as an indispensable tool to realize an optimal design of micro-mirror.