کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1580100 | 1645418 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Anomalous large internal friction observed for nm-thick Ag film below room temperature
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The internal friction of a nm-thick Ag film deposited on a Si substrate was studied. In a sputter deposited (SD-) Ag film on wet-oxidized high-boron CZ-Si (WO-SiBCZ), pre-exposure of air(wet) brings about the 200-250Â K twin peaks, and the warming up to 300Â K in a vacuum causes disappearance of the twin peaks. The peak height of the 200-250Â K twin peaks shows the maximum at the SD-Ag film thickness of about 80Â nm. No or very low peaks are observed in all the SD-Ag films on hydrogen terminated (HT-) or thermally-oxidized Si substrates. The interface region between SD-Ag and WO-SiBCZ containing OH molecules is responsible for the 200-250Â K twin peaks. The underlying mechanism of the peaks is not known at present.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: A - Volumes 521â522, 15 September 2009, Pages 291-294
Journal: Materials Science and Engineering: A - Volumes 521â522, 15 September 2009, Pages 291-294
نویسندگان
H. Tanimoto, A. Fujiwara, K. Yamaura, H. Mizubayashi,