کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1586085 | 1514928 | 2006 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Elimination of surface debris generated by KrF excimer laser ablation of polyimide
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The excimer laser ablation of a polymer occurs by the excitation of chemical bonds to energy levels that are above the dissociation energy. In this process, however, fragmented debris is finally ejected explosively by the scission of bonds and accumulates on the material surface. In the present work, a process for eliminating surface debris contamination generated by the laser ablation of a polymer is developed. The proposed approach for removing surface debris utilizes an erasable ink pasted on a polyimide. The ink-pasted polyimide is ablated by a KrF excimer laser. The surface debris ejected from the polyimide is then combined with the ink layer on the polyimide. Finally, both the surface debris and the ink layer are removed using adhesive tape or alcohol solvent. The results suggest that the erasable ink method is a simple, low cost, and extremely effective debris eliminating process.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: A - Volume 416, Issues 1â2, 25 January 2006, Pages 205-210
Journal: Materials Science and Engineering: A - Volume 416, Issues 1â2, 25 January 2006, Pages 205-210
نویسندگان
Dong Sig Shin, Jae Hoon Lee, Jeong Suh, To Hoon Kim,