Enhanced electrical properties from barium strontium titanate multilayer films

• The same Ba/Sr ratio BST films of both multilayered and uniform structure were prepared by MOD.
• Compared with the homogeneous BST film, the multilayered BST film shows improved electrical properties.
• Our results show the effects of multilayered structure by eliminating the influence of the Ba/Sr ratio change.

Both multilayered and homogeneous BST films with the same ratio of Ba to Sr are prepared by metal-organic deposition on (111) Pt/Ti/SiO2/Si substrates. X-ray diffraction reveals the microstructure of the samples. Compared with the homogeneous BST film, the multilayered BST film shows improved electrical properties with smaller leakage current, larger dielectric constant, higher tunability and better ferroelectrity. These results are associated with the multilayered structure and strain-related interactions between layers, and the possible causes of which are discussed.