Growth of highly (110)- and (111)-textured SrTiO3 thin films on Pt(111)/α-Al2O3(0001) substrates by ECR ion beam sputter deposition

► Highly (110)- and (111)-textured SrTiO3 films were grown on Pt(111)/α-Al2O3(0001) substrates. ► Structural properties were analyzed by HRXRD and in-plane pole figure measurement. ► Grain shape and orientation were dependent on the film orientation. ► Conduction mechanism was found to follow Schottky and Poole-Frenkel behaviors. ► Highly (111)-textured SrTiO3 film showed a larger dielectric constant than the (110)-textured film.