کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1594216 | 1515692 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition](/preview/png/1594216.png)
چکیده انگلیسی
ZnO thin film was deposited on Si substrate with the insertion of ZnO buffer layer, which was annealed at various temperatures between 600 and 900 ∘C. ZnO thin film was grown by Atomic layer deposition (ALD) technique and the ZnO/ZnO-buffer/Si films have been further annealed for 30 min in N2 ambient. High quality ZnO thin films were obtained on the annealed ZnO-buffer/Si layer. In particular, the ZnO thin film that is grown on 750 ∘C-annealed ZnO buffer exhibits a smoother surface, and enhanced near-band-edge emission compared to those grown on the as-prepared ZnO buffer layer. In the meantime, ZnO with 900 ∘C-annealed ZnO buffer layer shows the narrowest and strongest (002) peak from the XRD measurement.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid State Communications - Volume 148, Issues 9–10, December 2008, Pages 395–398
Journal: Solid State Communications - Volume 148, Issues 9–10, December 2008, Pages 395–398
نویسندگان
C.R. Kim, J.Y. Lee, C.M. Shin, J.Y. Leem, H. Ryu, J.H. Chang, H.C. Lee, C.S. Son, W.J. Lee, W.G. Jung, S.T. Tan, J.L. Zhao, X.W. Sun,