کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1604539 | 1516013 | 2008 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
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چکیده انگلیسی
Coatings of TiN have been deposited by thermal CVD between 850 and 1050 °C and characterized with respect to their microstructure as well as mechanical and tribological properties. X-ray diffraction (XRD) analysis yields the formation of textured films, particularly at low deposition temperatures. It is shown that the coating hardness changes with the texture, where highly (2 1 1) oriented films exhibit a lower hardness compared to non-textured coatings. The wear resistance has been determined by dry sliding experiments against Al2O3 balls at 25 °C on both as-deposited and polished samples. Independent on the surface roughness, the smaller grain size of the textured films causes a higher toughness and results in a better wear resistance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Refractory Metals and Hard Materials - Volume 26, Issue 2, March 2008, Pages 120–126
Journal: International Journal of Refractory Metals and Hard Materials - Volume 26, Issue 2, March 2008, Pages 120–126
نویسندگان
J. Wagner, C. Mitterer, M. Penoy, C. Michotte, W. Wallgram, M. Kathrein,