کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1637240 | 1516999 | 2012 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition](/preview/png/1637240.png)
چکیده انگلیسی
Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4, BCl3, H2, N2, and Ar. By virtue of X-ray diffraction analysis, X-ray photoelectron spectroscopy, scanning electron microscope, and high-resolution transmission electron microscope, the influences of B content on the microstructure and properties of Ti-B-N coatings were investigated systematically. The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase. With increasing B content and decreasing N content in the coatings, the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2/a-BN via FCC-TiN+HCP-TiB2/a-BN. The highest microhardness of about 34 GPa is achieved, which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase. The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN phase.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Transactions of Nonferrous Metals Society of China - Volume 22, Supplement 3, December 2012, Pages s722-s728
Journal: Transactions of Nonferrous Metals Society of China - Volume 22, Supplement 3, December 2012, Pages s722-s728
نویسندگان
Jung Ho SHIN, Kwang Soo CHOI, Tie-gang WANG, Kwang Ho KIM, Roman NOWAK,