Mechanical performance and corrosion behavior of TiAlSiN/WS2 multilayer deposited by multi-plasma immersion ion implantation and deposition and magnetron sputtering

To reduce the friction coefficient of the superhard TiAlSiN composite coating, TiAlSiN/WS2 multilayers were synthesized by multiple plasma immersion ion implantation and deposition as well as radio-frequency (RF) magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectrum, nano indentation, tribological and electrochemical tests were employed to characterize the microstructure, mechanical properties and corrosion behavior of the as-deposited multilayers. SEM results reveal that the TiAlSiN/WS2 multilayers have a good periodicity. Nano indentation results show that the nanohardness of TiAlSiN/WS2 multilayers is between that of the TiAlSiN and WS2 coatings. Tribological tests prove that the friction coefficient of the TiAlSiN/WS2 multilayers is lower and more stable than that of the TiAlSiN coating. In addition, the TiAlSiN/WS2 multilayers show excellent corrosion resistance and the corrosion current density decreases obviously at a relative small modulation period.