Preparation and bioactivity of SiO2 functional films on titanium by PACVD

SiO2 functional films were deposited on the surface of titanium by plasma assisted chemical vapour deposition(PACVD) and the composition of films was studied by XPS. Samples deposited with SiO2 films were immersed in different concentration simulated body fluid(SBF) for biomimetic deposition of hydroxyapatite(HA). The results show that SiO2 functional films deposited on titanium surface with PACVD have good bioactivity. Hydroxyapatite is formed while titanium coated with SiO2 is immersed in simulated body fluid for seven days.