Assembly of Hybrid Microsystems Using an Assembly System with 3D Optical Sensor

For the assembly of hybrid microsystems a high accuracy in the range of a few micrometers is required. The combination of a parallel robot with an integrated 3D vision sensor uses positioning marks on the objects for object recognition. Within the assembly process, relative positioning accuracies in the submicrometer range have been obtained. Therefore, it is necessary to use a calibration strategy for matching the coordinate system of the 3D vision sensor with the coordinate system of the robot. The construction of the system, the calibration applied and the positioning accuracy achieved by the robot will be discussed.