کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1679606 | 1010325 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Although micro ultrasonic machining (USM) has been successfully applied in generating micro features in hard and brittle materials such as silicon, the influence of machining parameters on the machining performance is not clearly understood. Experimental results show that the machining speed decreases with an increase in the static load beyond a certain level. In this study, the debris accumulation is proposed as the main reason leading to low machining efficiency. A mathematical model is also developed to analyze this phenomenon qualitatively. Experimental results reveal that the particle size is the dominate factor influencing the surface roughness in micro USM.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: CIRP Annals - Manufacturing Technology - Volume 55, Issue 1, 2006, Pages 201-204
Journal: CIRP Annals - Manufacturing Technology - Volume 55, Issue 1, 2006, Pages 201-204