کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1679871 | 1518436 | 2012 | 13 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Operation-dependent maintenance scheduling in flexible manufacturing systems Operation-dependent maintenance scheduling in flexible manufacturing systems](/preview/png/1679871.png)
In highly flexible and highly integrated manufacturing systems such as semiconductor manufacturing, the dynamic interactions between equipment condition, operations executed on the tools and product quality necessitate joint decision-making in maintenance scheduling and production operations. To address these problems, we devise an integrated decision-making policy optimizing a customizable objective function that takes into account operation-dependent degradation models and production target. Optimization was achieved using a metaheuristic method based on the results of discrete-event simulations of operations of the underlying manufacturing system. The method was applied to optimization of maintenance on a generic cluster tool routinely utilized in semiconductor manufacturing. The results show that operation-dependent maintenance decision-making outperforms the case where maintenance decisions are made without considerations of operation-dependent degradation dynamics.
Journal: CIRP Journal of Manufacturing Science and Technology - Volume 5, Issue 4, 2012, Pages 296–308