Characterization and optimization of the dynamic tool path of a highly dynamic micromilling machine

The miniaturization of components in the field of life science, consumer electronics and micro-electro-mechanical systems (MEMS) is becoming a part of our everyday life. As the manufacturing of these components demands in many cases the machining by micromilling with cutting tools down to 100 μm diameter, highly dynamic machine tools are needed to machine the more and more complex freeform surfaces at optimal process parameters. The paper describes the development of a highly dynamic milling machine which is equipped with linear direct drives in all axes with integrated impulse decoupling units to allow high dynamics and especially high jerks at low impact on the machine structure. Additionally the development of a metrology frame is detailed which can be used to characterize the dynamic tool path of machine tools to optimize its dynamic setup and to increase the work piece precision at minimized machining time.