Behavioral modeling of SRIM tables for numerical simulation

• Behavioral modeling of SRIM data is performed on the basis of power polynomial fitting functions.
• Fast and continuous numerical functions are proposed for the stopping power and projected range.
• Functions have been successfully tested for a wide variety of ions and targets.
• Typical accuracies below the percent have been obtained in the range 1 keV–1 GeV.

This work describes a simple way to implement SRIM stopping power and range tabulated data in the form of fast and continuous numerical functions for intensive simulation. We provide here the methodology of this behavioral modeling as well as the details of the implementation and some numerical examples for ions in silicon target. Developed functions have been successfully tested and used for the simulation of soft errors in microelectronics circuits.