Deconvolution of NICISS profiles involving elements of similar masses

Neutral impact collision ion scattering spectroscopy uses the backscattering of projectiles to determine the concentration depth profiles of elements in soft matter systems. As such, the measured profiles are the actual concentration depth profiles convoluted with the inelastic energy loss distribution of the projectile. The inelastic loss distribution depends on the element from which the projectile is backscattered. In the case that two elements of similar masses are detected, their profiles can overlap within these energy loss distributions. In this case the standard deconvolution procedure used must be modified to exclude the energy loss straggling of the projectiles in the bulk to adequately deconvolute the profiles of two elements at the same time.