Detection of H+ recoiled from Si(1 1 1)-1 × 1-H by medium energy Ne+ impact

► Uniform Si(1 1 1)-1 × 1-H surface preparation without HF. ► Dependence of H+ fraction upon emerging angle and energy. ► Energy spread of recoiled H+ spectra comes from the Doppler broadening of the zero-point energy of vibrating Si-H.