Planar waveguides in magnesium doped stoichiometric LiNbO3 crystals formed by MeV oxygen ion implantations

The planar waveguides were formed in magnesium doped stoichiometric LiNbO3 crystals by means of 4.5 MeV oxygen ion implantations at different fluences. The dark mode spectra were measured by the prism coupling method. The annealing behaviors of the formed waveguides were characterized by a series of annealing treatments. The Rutherford backscattering/channeling technique was used to investigate the damage produced by the ion implantation.