Planar Nd:YGG waveguide fabrication by multiple energy He ion implantation

Rare-earth garnet single-crystals are promising candidates for optical applications. Previous reports showed that they have controllability and good reservation of Nd ions fluorescent properties in the ion implanted waveguide. Thus, we studied the optical and fluorescent properties of the Nd:YGG waveguide structure formed by multi-energy He ion implantation. The fabrication and characterization of the optical planar waveguide in Nd:YGG crystal by using multi-energy He ion implantation was presented. The thermal stability of our ion-implanted Nd:YGG crystal was investigated. The guided-mode and annealing properties at the wavelength of 633 nm were investigated through prism-coupling and end-face coupling measurements, and the fluorescent properties were investigated by a confocal micro-luminescence experiment. This work could supply an operation reference for integrated optical devices.