کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1681091 | 1518747 | 2012 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Real space structural analysis using 3D MEIS spectra from a toroidal electrostatic analyzer with 2D detector
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
A three-dimensional medium energy ion scattering (3D-MEIS) method has been developed using a commercial MEIS apparatus. This method consists of filtering the energy of the ions scattered by the sample and measuring their two-dimensional angular distribution over a large region. These cartographies of the scattered particles reveal the angular positions of the crystallographic directions and atomic planes. The method is also element sensitive and allows depth profiling by selecting the energy of the scattered particles. As an example, the MEIS cartography technique is applied on a 49 nm thick compressively strained Si0.7Ge0.3 layer deposited on a Si (1 0 0) wafer.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 270, 1 January 2012, Pages 19–22
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 270, 1 January 2012, Pages 19–22
نویسندگان
D. Jalabert,