Angular distribution of atoms sputtered from alloys

The angular distribution of atoms sputtered from Co5Sm alloy under 3 keV Ar+ and 10 keV Xe+ ion bombardment (normal incidence) has been studied experimentally. RBS was used to analyze a material deposited on a collector. The surface composition of NixPdy alloys (x, y = 1, 3, 5) irradiated by 3 keV Ar+ ions was also investigated in situ by Auger electron spectroscopy. Results of these measurements compared with our previous data on component angular distributions sputtered from Ni5Pd alloy. Sm segregation was found to effect on component angular distributions sputtered from Co5Sm alloy. It has been found by using AES that Pd segregates to the surface in Ni5Pd–NiPd3 alloys, while Ni – in NiPd5 alloy. A new approach to description of component angular distributions sputtered from NixPdy and Co5Sm alloys presented.