کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1681543 1518650 2016 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
MultiSIMNRA: A computational tool for self-consistent ion beam analysis using SIMNRA
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
MultiSIMNRA: A computational tool for self-consistent ion beam analysis using SIMNRA
چکیده انگلیسی
SIMNRA is widely adopted by the scientific community of ion beam analysis for the simulation and interpretation of nuclear scattering techniques for material characterization. Taking advantage of its recognized reliability and quality of the simulations, we developed a computer program that uses multiple parallel sessions of SIMNRA to perform self-consistent analysis of data obtained by different ion beam techniques or in different experimental conditions of a given sample. In this paper, we present a result using MultiSIMNRA for a self-consistent multi-elemental analysis of a thin film produced by magnetron sputtering. The results demonstrate the potentialities of the self-consistent analysis and its feasibility using MultiSIMNRA.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 371, 15 March 2016, Pages 86-89
نویسندگان
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