Depth profiles of D and T in Metal-hydride films up to large depth

In this paper, a method combining D(3He, p) 4He nuclear reaction and proton backscattering (PBS) was adopted to detect the depth profile of both D and T in TiDxTy/Mo film with thickness more than 5 μm. Different energies of 3He and proton beam, varied from 1.0 to 3.0 MeV and 1.5 to 3.8 MeV respectively, were used in order to achieve better depth resolution. With carefully varying incident energies, an optimum resolution of less than 0.5 μm for D and T distribution throughout the whole analyzed range could be achieved.