کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1681567 1518650 2016 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check
چکیده انگلیسی
15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 371, 15 March 2016, Pages 211-215
نویسندگان
, , , , , , , , , , , , , , , , , ,