Analysis of surface morphological change in PET films induced by tungsten ion implantation

Surface morphological changes and metal nanograin formation of polyethylene terephthalate films with tungsten ion implantation were studied. Tungsten ions were accelerated with a voltage of 40 kV and implanted at fluences from 5 × 1016 to 2 × 1017 cm−2 using a metal vapor vacuum arc implanter. Scanning electron micrographs at the highest fluence show semi-spherical hills, indicating formation of tungsten nanograins on the polymer. The tungsten nanograin formation in the polymer film is confirmed by cross-sectional observation using transmission electron microscopy. Depth profiles of tungsten atoms obtained from energy dispersive X-ray spectra indicate densification and sputtering of the polymer surface layer during implantation. These results indicate that surface morphological change is related with the effects of a critical fluence and tungsten nanograin formation.