Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition

W is regarded as one of the most promising candidate materials for plasma-facing materials in future fusion reactors. For this reason, W is studied in variety of formats, such as W blocks, W alloys, W films. In this work, W thin films were prepared by magnetron sputtering deposition. Different materials were used as the substrates. Hydrogen plasma irradiation effect of the thin films was investigated.