کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1682158 1518716 2013 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation
چکیده انگلیسی


• Multi-element films are prepared by combined magnetron sputtering and PBII.
• XPS confirms ZrN, TiN, TaN, Nb–N, ZrO2, Ta, Nb and W in the nitride film.
• Multi-element (ZrTaNbTiW)N films formed BCC and FCC phases.
• Maximum hardness and elastic modulus of nitride films reached 13.5 and 178.9 GPa.

Multi-element (ZrTaNbTiW)N films are prepared by multi-target magnetron sputtering deposition and nitrogen plasma based ion implantation (PBII). The composition, structure and mechanical properties of the films are investigated. X-ray photoelectron spectroscopy (XPS) confirms the formation of a mixture of ZrN, TiN, TaN, Nb–N, ZrO2, Ta, Nb and W in the nitride film. X-ray diffraction (XRD) shows that the (ZrTaNbTiW) alloy film exhibits an amorphous phase, while the (ZrTaNbTiW)N nitride films are composed of BCC and FCC structures. The hardness and modulus of the films are improved significantly after nitrogen PBII and reach maximum values of 13.5 and 178.9 GPa, respectively.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 301, 15 April 2013, Pages 29–35
نویسندگان
, , , , ,